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A wafer carrier for use in the transportation and storage of semiconductor wafers. More particularly, the invention is a wafer carrier having both a rigid

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A wafer carrier for use in the transportation and storage of semiconductor wafers. More particularly, the invention is a wafer carrier having both a rigid

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Y10S414/14—Wafer cassette transporting Abstract An apparatus for loading semicylindrical cantilever paddle 8 is composed of quartz, silicon carbide,

US Patent # 1,026,2885. Multifunction wafer and film frame

2019416-A multifunction wafer and film frame handling system includes a wafer table assembly having a wafer table providing an ultra-planar wafer ta